AMAT 40KW 480VAC ENI master 0190-07964W AMAT 40KW slave 0190-19811W AMAT 60KW 480VAC ENI slave new 0190-07969 AMAT B-5002 0190-15320 refurbished AMAT QUANTUM beam profiler micro controller 0100-90990 AMAT CD52 clamp unit 0090-91598 AMAT convertor 9090-00397 AMAT DC power supply new 0190-23636